| 000 | 02657nam a22004935i 4500 | ||
|---|---|---|---|
| 001 | vtls000540936 | ||
| 003 | RU-ToGU | ||
| 005 | 20210922082028.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 160915s2014 xxu| s |||| 0|eng d | ||
| 020 |
_a9781461480549 _9978-1-4614-8054-9 |
||
| 024 | 7 |
_a10.1007/978-1-4614-8054-9 _2doi |
|
| 035 | _ato000540936 | ||
| 040 |
_aSpringer _cSpringer _dRU-ToGU |
||
| 050 | 4 | _aQD551-578 | |
| 072 | 7 |
_aPNRH _2bicssc |
|
| 072 | 7 |
_aSCI013050 _2bisacsh |
|
| 082 | 0 | 4 |
_a541.37 _223 |
| 245 | 1 | 0 |
_aAtomic Layer Deposition for Semiconductors _helectronic resource _cedited by Choel Seong Hwang. |
| 260 |
_aBoston, MA : _bSpringer US : _bImprint: Springer, _c2014. |
||
| 300 |
_aX, 263 p. 170 illus., 81 illus. in color. _bonline resource. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_acomputer _bc _2rdamedia |
||
| 338 |
_aonline resource _bcr _2rdacarrier |
||
| 505 | 0 | _aIntroduction -- Precursors and reaction mechanisms -- ALD simulations -- ALD for mass-production memories (DRAM and Flash) -- ALD for emerging memories -- PcRAM -- FeRAM -- Front end of the line process -- Back end of the line -- ALD machines. | |
| 520 | _aAtomic Layer Deposition (ALD) was originally designed for depositing uniform passivation layers over a very large area for display devices in the late 1970s. Only recently, in the 21st century, has the this technique become popular for high integrated semiconductor memory devices. This book discusses ALD for all modern semiconductor devices, the basic chemistry of ALD, and models of ALD processes. The book also details ALD for both mass produced memories and emerging memories. Each chapter of the book provides history, operating principles, and a full explanation of ALD processes for each device. | ||
| 650 | 0 |
_achemistry. _9161768 |
|
| 650 | 0 |
_aMemory management (Computer science). _9306582 |
|
| 650 | 0 |
_aelectronics. _9303071 |
|
| 650 | 0 |
_aElectric engineering. _9304460 |
|
| 650 | 1 | 4 |
_aChemistry. _9161768 |
| 650 | 2 | 4 |
_aElectrochemistry. _9303338 |
| 650 | 2 | 4 |
_aSemiconductors. _9410520 |
| 650 | 2 | 4 |
_aMemory Structures. _9306583 |
| 650 | 2 | 4 |
_aEnergy Technology. _9316263 |
| 650 | 2 | 4 |
_aElectronics and Microelectronics, Instrumentation. _9303076 |
| 700 | 1 |
_aHwang, Choel Seong. _eeditor. _9446501 |
|
| 710 | 2 |
_aSpringerLink (Online service) _9143950 |
|
| 773 | 0 | _tSpringer eBooks | |
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-1-4614-8054-9 |
| 912 | _aZDB-2-CMS | ||
| 999 | _c399082 | ||