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Micro process engineering fundamentals, devices, fabrication, and applications edited by Oliver Brand [a. o.]
Material type:
TextSeries: Advanced micro & nanosystems / ed. by Norbert KochmannPublication details: Weinheim [a. o.] Wiley-VCH Verlag 2006Description: xxii, 507 p. illISBN: 3527312463Subject(s): микропроцессы | микросистемы | нанотехнологии | наноматериалы | наносистемы
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
| Выдается по месту хранения | Научная библиотека ТГУ Читальный зал 5 | 620.22 M65 (Browse shelf(Opens below)) | Available | 13820000576152 |
Index: p. 497-507
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