Ion implantation in β-Ga2O3: Physics and technology A. Nikolskaya, E. Okulich, D. Korolev [et al.] by Nikolskaya, Alena | Okulich, Evgenia | Korolev, Dmitry | Stepanov, Anton | Nikolichev, Dmitry | Mikhaylov, Alexey | Tetelbaum, David | Almaev, Aleksei V | Bolzan, Charles Airton | Buaczik, Antônio Jr | Giulian, Raquel | Grande, Pedro Luis | Kumar, Ashok | Kumar, Mahesh | Gogova, Daniela S.
Source: Journal of vacuum science & technology AMaterial type: Article; Format:
electronic
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