TY - BOOK AU - Ghosh,Amitabha AU - Corves,Burkhard ED - SpringerLink (Online service) TI - Introduction to Micromechanisms and Microactuators T2 - Mechanisms and Machine Science, SN - 9788132221449 AV - TA213-215 U1 - 621.8 23 PY - 2015/// CY - New Delhi PB - Springer India, Imprint: Springer KW - engineering KW - Vibration KW - Dynamical systems KW - Dynamics KW - Machinery KW - Nanotechnology KW - Mechatronics KW - Engineering KW - Machinery and Machine Elements KW - Nanotechnology and Microengineering KW - Vibration, Dynamical Systems, Control N1 - Introduction -- Miniaturization and Microsystems -- Scaling Laws: Science of Miniaturization -- Micromechanisms -- Design of Micromechanisms -- Dynamics of Micromechanisms -- Microactuators -- Microfabrication and Futuristic Issues N2 - This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic UR - http://dx.doi.org/10.1007/978-81-322-2144-9 ER -