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Atomic layer deposition of artificially structured dielectric materials Dissertation for the degree of Doctor of Philosophy in physics
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TextSeries: Dissertationes physicae Universitatis TartuensisPublication details: Tartu Tartu University Press 1999Description: 159 p. figISBN: 9985563883Subject(s): диэлектрики | диссертации
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
| Выдается в читальный зал | Научная библиотека ТГУ Книгохранилище | 1-857330к 537 (Browse shelf(Opens below)) | 1 | Available | 13820000081552 |
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