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Шаги к микроразмерам методы микроминиатюризации В. К. Александров; под ред. В. А. Пилиповича

By: Александров, Владимир КузьмичContributor(s): Пилипович, В. А [edt]Material type: TextTextLanguage: Russian Publication details: Минск Наука и техника 1983Description: 72 с. ил. 16 смSubject(s): микроэлектроникаOther classification: 24.3
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Библиогр.: с. 71

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