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Библиогр.: 32 назв.

The gradient coating synthesized on a nickelide titanium sample by sputtering a three-layer Ti-Ni-Ti laminate
and annealing in air at 950–1000 °С was studied by XRD, SEM, TEM, and AFM methods. The thickness of the
sputtered laminate layers was chosen equal to 0.5–1.0 μm to study the composition, structure and sequence of
formation of the crystalline phases of the gradient coating. This thickness was sufficient for SEM and TEM studies
and admissible large for XRD studies of phase composition. SEM and TEM techniques were used to determine the
depth and patterns of grains occurrence of titanium carbonitrides. TEM and XRD techniques revealed that reactive
synthesis of the coating is followed by transformation of the external amorphous layer of deposited titanium
into heterogeneous crystalline titanium oxides. Crystallization of the oxide phase causes an increase in
the volume of the external layer and intergranular cracking of the surface. AFM method showed an island
microrelief of the external titanium layer formed during synthesis. The reaction synthesis of a multilayer laminate
allows obtaining multifunctional nano-structured multilayer coatings with high chemical, mechanical
and tribological characteristics, which ensures bioinertness of the surface of titanium nickelide implants.